SEMICONDUCTOR STRUCTURE AND FABRICATION METHOD THEREOF

• Main Authors: Li, Yanzun, Sadana, Devendra K, Zhang, John H, Ji, Brian Li
• Format: Patent
• Language: English
• Published: 07.09.2023
• Subjects: ELECTRICITY

A semiconductor structure includes a substrate having a doped silicon substrate, a buried oxide layer, and a silicon device layer. A trench capacitor having an inner electrode and a node dielectric layer is formed in a trench of the substrate. The inner electrode and the node dielectric layer extend into the doped silicon substrate. A select transistor is disposed in the silicon device layer. An embedded contact is disposed atop the trench capacitor to electrically couple a doped region of the select transistor with the inner electrode. A first dielectric layer is disposed around the select transistor. A second dielectric layer is deposited on the first dielectric layer. A contact plug is formed in the second dielectric layer and the first dielectric layer and is in direct contact with the embedded contact. A memory stack with a MTJ element is disposed on the contact plug.