VOLTAGE WAVEFORM GENERATOR FOR PLASMA ASSISTED PROCESSING APPARATUSES

A voltage waveform generator includes a common node, a voltage waveform generation circuit and a current source. The voltage waveform generation circuit is operably connected to the common node and is configured to apply a voltage signal at the common node. The current source is operably connected t...

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Bibliographic Details
Main Authors SLAATS, Noud, EVERTS, Jordi
Format Patent
LanguageEnglish
Published 17.08.2023
Subjects
BASIC ELECTRIC ELEMENTS
ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
ELECTRICITY
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