VOLTAGE WAVEFORM GENERATOR FOR PLASMA ASSISTED PROCESSING APPARATUSES

A voltage waveform generator includes a common node, a voltage waveform generation circuit and a current source. The voltage waveform generation circuit is operably connected to the common node and is configured to apply a voltage signal at the common node. The current source is operably connected t...

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Bibliographic Details
Main Authors SLAATS, Noud, EVERTS, Jordi
Format Patent
LanguageEnglish
Published 17.08.2023
Subjects
BASIC ELECTRIC ELEMENTS
ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
ELECTRICITY
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Summary:A voltage waveform generator includes a common node, a voltage waveform generation circuit and a current source. The voltage waveform generation circuit is operably connected to the common node and is configured to apply a voltage signal at the common node. The current source is operably connected to the common node and configured to apply a DC current at the common node. The current source has a first switch node connected to the common node through a first inductor, and a first power supply connected to the first switch node. The power supply includes at least two first voltage nodes, and the current source is operable to switch between the at least two first voltage nodes at the first switch node.
Bibliography:Application Number: US202118005326