Temperature Control For Insertable Target Holder For Solid Dopant Materials

An ion source with a target holder for holding a solid dopant material is disclosed. The ion source comprises a thermocouple disposed proximate the target holder to monitor the temperature of the solid dopant material. In certain embodiments, a controller uses this temperature information to vary on...

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Bibliographic Details
Main Authors Tieger, Daniel R, Bogiages, Jr., William R, Patel, Shreyansh P, Wright, Graham, Gori, Brian S, Chaney, Craig R, Alvarado, Daniel, Oswald, Benjamin
Format Patent
LanguageEnglish
Published 17.08.2023
Subjects
BASIC ELECTRIC ELEMENTS
ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
ELECTRICITY
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Summary:An ion source with a target holder for holding a solid dopant material is disclosed. The ion source comprises a thermocouple disposed proximate the target holder to monitor the temperature of the solid dopant material. In certain embodiments, a controller uses this temperature information to vary one or more parameters of the ion source, such as arc voltage, cathode bias voltage, extracted beam current, or the position of the target holder within the arc chamber. Various embodiments showing the connections between the controller and the thermocouple are shown. Further, embodiments showing various placement of the thermocouple on the target holder are also presented.
Bibliography:Application Number: US202318136738