Composite Hard Masks For Ultra-Thin Magnetic Sensors
A composite hard mask is disclosed. In some embodiments, a first sacrificial hard mask layer comprising an amorphous carbon or silicon nitride and a second sacrificial hard mask layer comprising a silicon nitride, silicon oxide, metal, metal oxide, or metal nitride, wherein the first and second sacr...
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Main Authors | , , , , , , , , |
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Format | Patent |
Language | English |
Published |
17.08.2023
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Subjects | |
Online Access | Get full text |
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Summary: | A composite hard mask is disclosed. In some embodiments, a first sacrificial hard mask layer comprising an amorphous carbon or silicon nitride and a second sacrificial hard mask layer comprising a silicon nitride, silicon oxide, metal, metal oxide, or metal nitride, wherein the first and second sacrificial hard mask layers are not made of the same material. |
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Bibliography: | Application Number: US202217671413 |