ELECTRONIC DEVICES INCLUDING SUPPORT PILLARS IN SLOT REGIONS, AND RELATED MEMORY DEVICES, SYSTEMS, AND METHODS

An electronic device comprises a stack comprising tiers of alternating conductive levels and insulative levels overlying a source, slots extending vertically through the stack and dividing the stack into blocks, and support pillars within the slots and extending vertically through the stack. The sup...

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Bibliographic Details
Main Authors Clampitt, Darwin A, Lindsay, Roger W, Hopkins, John D
Format Patent
LanguageEnglish
Published 10.08.2023
Subjects
INFORMATION STORAGE
PHYSICS
STATIC STORES
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Summary:An electronic device comprises a stack comprising tiers of alternating conductive levels and insulative levels overlying a source, slots extending vertically through the stack and dividing the stack into blocks, and support pillars within the slots and extending vertically through the stack. The support pillars exhibit a lateral dimension in a first horizontal direction relatively larger than a lateral dimension of the slots in the first horizontal direction, substantially orthogonal to a second horizontal direction in which the slots extend. Related memory devices, systems, and methods are also described.
Bibliography:Application Number: US202217668304