APPARATUS FOR ANALYZING AND/OR PROCESSING A SAMPLE WITH A PARTICLE BEAM AND METHOD

An apparatus for analyzing and/or processing a sample with a particle beam, comprising:a sample stage for holding the sample;a providing unit for providing the particle beam comprising:an opening for guiding the particle beam to a processing position on the sample; anda shielding element for shieldi...

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Bibliographic Details
Main Authors Hofmann, Thorsten, Oster, Jens, Auth, Nicole, Budach, Michael
Format Patent
LanguageEnglish
Published 27.07.2023
Subjects
BASIC ELECTRIC ELEMENTS
ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
ELECTRICITY
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Summary:An apparatus for analyzing and/or processing a sample with a particle beam, comprising:a sample stage for holding the sample;a providing unit for providing the particle beam comprising:an opening for guiding the particle beam to a processing position on the sample; anda shielding element for shielding an electric field generated by charges accumulated on the sample;wherein the shielding element covers the opening, is embodied in sheetlike fashion and comprises an electrically conductive material;wherein the shielding element comprises a convex section, this section being convex in relation to the sample stage; andwherein the convex section has a through opening for the particle beam to pass through to the sample.
Bibliography:Application Number: US202318121722