TRANSISTOR AND METHOD FOR MANUFACTURING THE SAME

Some implementations described herein provide a semiconductor structure. The semiconductor structure includes a first terminal coupled to a substrate of the semiconductor structure. The first terminal comprises a tunneling layer formed on the substrate, a first conductive structure formed on the tun...

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Main Authors LIN, Yu-Chu, JEN, Chi-Chung, SU, Mei-Chen, SU, Ming-Hong, PAN, Chia-Ming, CHIANG, Wen-Chih, LEE, Chia-Wei, SU, Kuan-Wei
Format Patent
LanguageEnglish
Published 13.07.2023
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Summary:Some implementations described herein provide a semiconductor structure. The semiconductor structure includes a first terminal coupled to a substrate of the semiconductor structure. The first terminal comprises a tunneling layer formed on the substrate, a first conductive structure formed on the tunneling layer, and a dielectric structure formed on a top surface and on a first curved side surface of the first conductive structure. The semiconductor structure includes a second terminal coupled to the substrate. The second terminal comprises a second conductive structure formed on an isolation structure. The second conductive structure has a second curved side surface, and the dielectric structure is disposed between the first curved side surface and the second curved side surface.
Bibliography:Application Number: US202318174687