FLAT BOTTOM SHADOW RING
In some examples, a flat Bottom Shadow Ring (fBSR) is provided for processing a substrate in a processing chamber. An example fBSR comprises an overhang for covering an edge of the substrate in the processing chamber. The overhang includes a fiat zone that extends radially outward over the outer edg...
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Main Authors | , , , , , , , , |
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Format | Patent |
Language | English |
Published |
13.07.2023
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Subjects | |
Online Access | Get full text |
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Summary: | In some examples, a flat Bottom Shadow Ring (fBSR) is provided for processing a substrate in a processing chamber. An example fBSR comprises an overhang for covering an edge of the substrate in the processing chamber. The overhang includes a fiat zone that extends radially outward over the outer edge of the substrate. |
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Bibliography: | Application Number: US202118009254 |