PRESSED SILICON CARBIDE CERAMIC (SIC) FLUIDIC MODULES WITH INTEGRATED HEAT EXCHANGE
A silicon carbide flow reactor fluidic module comprises a monolithic closed-porosity silicon carbide body, a tortuous fluid passage extending through the silicon carbide body, the tortuous fluid passage having an interior surface, and one or more thermal control fluid passages also extending through...
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Main Authors | , , |
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Format | Patent |
Language | English |
Published |
13.07.2023
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Subjects | |
Online Access | Get full text |
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Summary: | A silicon carbide flow reactor fluidic module comprises a monolithic closed-porosity silicon carbide body, a tortuous fluid passage extending through the silicon carbide body, the tortuous fluid passage having an interior surface, and one or more thermal control fluid passages also extending through the silicon carbide body, the interior surface having a surface roughness of less than 10 μm Ra. A process for forming such modules is also disclosed. |
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Bibliography: | Application Number: US202118010955 |