DUTY CYCLE CONTROL TO ACHIEVE UNIFORMITY

A method for achieving a first uniformity level in a processing rate across a surface of a substrate is described. The method includes receiving the first uniformity level to be achieved across the surface of the substrate and identifying a first plurality of duty cycles associated with a first plur...

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Bibliographic Details
Main Authors Bhowmick, Ranadeep, Holland, John P, Marakhtanov, Alexei M, Kozakevich, Felix Leib, Ji, Bing
Format Patent
LanguageEnglish
Published 06.07.2023
Subjects
BASIC ELECTRIC ELEMENTS
BASIC ELECTRONIC CIRCUITRY
ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
ELECTRICITY
PULSE TECHNIQUE
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Summary:A method for achieving a first uniformity level in a processing rate across a surface of a substrate is described. The method includes receiving the first uniformity level to be achieved across the surface of the substrate and identifying a first plurality of duty cycles associated with a first plurality of states based on the first uniformity level. The first plurality of states are of a variable of a first radio frequency (RF) signal. The method further includes controlling an RF generator to generate the first RF signal having the first plurality of duty cycles.
Bibliography:Application Number: US202118011131