MEASURING INSTRUMENT AND MEASURING METHOD

A measuring instrument according to an exemplary embodiment includes a base board, at least one sensor chip provided on the base board, and a circuit board provided on the base board. The at least one sensor chip includes a sensor unit including a signal electrode having a front surface intersecting...

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Bibliographic Details
Main Authors YOKOYAMA, Kimihiro, HATANAKA, Takayuki
Format Patent
LanguageEnglish
Published 29.06.2023
Subjects
BASIC ELECTRIC ELEMENTS
ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
ELECTRICITY
MEASURING
MEASURING ELECTRIC VARIABLES
MEASURING MAGNETIC VARIABLES
PHYSICS
TESTING
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Summary:A measuring instrument according to an exemplary embodiment includes a base board, at least one sensor chip provided on the base board, and a circuit board provided on the base board. The at least one sensor chip includes a sensor unit including a signal electrode having a front surface intersecting the base board in a radial direction, a guard electrode disposed on a rear side of the signal electrode, and a first ground electrode disposed on a rear side of the guard electrode. The at least one sensor chip includes a second ground electrode extending along a lower surface of the sensor unit. A space between the second ground electrode and the sensor unit is filled with an insulating material.
Bibliography:Application Number: US202218145663