MULTIPLE WAFER STACK ARCHITECTURE TO ENABLE SINGULATION
Microelectronic stacked die package structures formed according to some embodiments may include a first die comprising a first conductive layer over a substrate layer. A second die may be on the first conductive layer. A third die is on the second die. An edge region of the stacked die package struc...
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Main Authors | , |
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Format | Patent |
Language | English |
Published |
22.06.2023
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Subjects | |
Online Access | Get full text |
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Summary: | Microelectronic stacked die package structures formed according to some embodiments may include a first die comprising a first conductive layer over a substrate layer. A second die may be on the first conductive layer. A third die is on the second die. An edge region of the stacked die package structure comprises a first portion over a second portion, the first portion comprising edges of the third die, the second die, and the first conductive layer, and the second portion comprising the substrate layer of the first die, wherein the first portion comprises a curved profile, and the second portion comprises a substantially vertical profile. |
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Bibliography: | Application Number: US202117558995 |