METHOD AND APPARATUS FOR DETERMINING CABLE LENGTH FOR PLASMA PROCESSING EQUIPMENT

Proposed are a method and an apparatus for determining a cable length for plasma processing equipment. More particularly, proposed is a method of determining a length of a power supply cable for plasma processing equipment that performs plasma processing through power supply at radio frequencies (RF...

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Bibliographic Details
Main Authors SEONG, Hyo Seong, KIM, Ji Hyun, GU, Ja Myung, JO, Tae Hoon
Format Patent
LanguageEnglish
Published 22.06.2023
Subjects
MEASURING
MEASURING ELECTRIC VARIABLES
MEASURING MAGNETIC VARIABLES
PHYSICS
TESTING
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Summary:Proposed are a method and an apparatus for determining a cable length for plasma processing equipment. More particularly, proposed is a method of determining a length of a power supply cable for plasma processing equipment that performs plasma processing through power supply at radio frequencies (RF) of several tens of MHz or more.
Bibliography:Application Number: US202217992972