ELECTRONIC DEVICE HAVING ALIGNMENT MARK

• Main Authors: HUANG, Yu-Wei, HUNG, Tsung-Yi
• Format: Patent
• Language: English
• Published: 15.06.2023
• Subjects: BASIC ELECTRIC ELEMENTS; ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR; ELECTRICITY; SEMICONDUCTOR DEVICES

An electronic device includes a via-array substrate, an outer layer, and an alignment substrate. The via-array substrate has a plurality of first vias. The outer layer has a plurality of second vias and is disposed on a side of the via-array substrate. The first vias are greater in distribution density or quantity than the second vias. A part of the first vias is electrically connected to the second vias, and another part of the first vias is electrically floating. The alignment substrate includes a core layer disposed on the outer layer, a plurality of conductive traces, a plurality of interconnecting pads, and a plurality of alignment mark pads. The conductive traces are disposed in the core layer. The interconnecting pads and the alignment mark pads are disposed on a surface of the core layer located away from the outer layer. A part of the conductive traces electrically connects a part of the interconnecting pads and a part of the first vias. A pattern of each of the alignment mark pads is different from a pattern of each of the interconnecting pads.