RF MAGNETIC FIELD SENSOR FOR HARMONIC MEASUREMENTS AND UNIFORMITY CONTROL

A magnetic field sensor for measuring magnetic field of a current applied to a lower electrode defined within a plasma chamber includes a conductor element disposed along a length of a tubular housing. A plurality of slots is defined on one side of the tubular housing to expose the conductor element...

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Bibliographic Details
Main Author Kozakevich, Felix Leib
Format Patent
LanguageEnglish
Published 08.06.2023
Subjects
BASIC ELECTRIC ELEMENTS
ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
ELECTRICITY
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Summary:A magnetic field sensor for measuring magnetic field of a current applied to a lower electrode defined within a plasma chamber includes a conductor element disposed along a length of a tubular housing. A plurality of slots is defined on one side of the tubular housing to expose the conductor element.
Bibliography:Application Number: US202117912825