THREE-DIMENSIONAL ROUGHNESS EXTRACTION OF METAL

A computer-implemented method of assessing roughness in metallic lines of an integrated circuit (IC) is provided. The computer-implemented method includes developing a library of roughness characterizations for metal lines of varying characteristics and dimensions. The computer-implemented method fu...

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Bibliographic Details
Main Authors Clevenger, Lawrence A, Penny, Christopher J, Motoyama, Koichi, MUTHINTI, GANGADHARA RAJA
Format Patent
LanguageEnglish
Published 08.06.2023
Subjects
CALCULATING
COMPUTING
COUNTING
ELECTRIC DIGITAL DATA PROCESSING
PHYSICS
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Summary:A computer-implemented method of assessing roughness in metallic lines of an integrated circuit (IC) is provided. The computer-implemented method includes developing a library of roughness characterizations for metal lines of varying characteristics and dimensions. The computer-implemented method further includes fabricating a testable IC and identifying, in the testable IC, a location of interest (LoI) at which roughness of a metal line within the LoI could impact IC performance. Also, the computer-implemented method includes developing, from the library, a roughness model using the roughness characterizations for those metal lines having characteristics and dimensions corresponding to those of the metal line within the LoI and refining the library and the roughness model based on a comparison of the roughness model and an actual roughness of the metal line within the LoI to obtain a final roughness model.
Bibliography:Application Number: US202117542882