EXPANDING APPARATUS

An expanding apparatus includes a frame fixing part that fixes an annular frame of a workpiece unit, a holding table that holds a workpiece, an expanding unit that expands a sheet, a heating unit that heats the sheet between an outer circumferential side of the workpiece and an inner circumferential...

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Bibliographic Details
Main Authors Matsuda, Tomohito, Masada, Takayuki, Fujii, Yuhei, Takesue, Naoya
Format Patent
LanguageEnglish
Published 01.06.2023
Subjects
BASIC ELECTRIC ELEMENTS
ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR
ELECTRICITY
SEMICONDUCTOR DEVICES
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Summary:An expanding apparatus includes a frame fixing part that fixes an annular frame of a workpiece unit, a holding table that holds a workpiece, an expanding unit that expands a sheet, a heating unit that heats the sheet between an outer circumferential side of the workpiece and an inner circumferential edge of the annular frame, and a cover that covers the workpiece held by the holding table. The cover covers the workpiece when the sheet is heated by the heating unit.
Bibliography:Application Number: US202218071014