COMPACT PHOTOACOUSTIC DETECTION DEVICE
The invention relates to a device for detecting a gaseous species by photoacoustic effect. The device comprises a substrate, inside which a cavity is formed. A light source is disposed on the substrate, in such a way that a part of the substrate extends between the light source and the cavity. The d...
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Main Authors | , , , |
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Format | Patent |
Language | English |
Published |
01.06.2023
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Subjects | |
Online Access | Get full text |
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Summary: | The invention relates to a device for detecting a gaseous species by photoacoustic effect. The device comprises a substrate, inside which a cavity is formed. A light source is disposed on the substrate, in such a way that a part of the substrate extends between the light source and the cavity. The device is arranged in such a way that the light, emitted by the light source, is propagated through the substrate, before reaching the cavity. |
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Bibliography: | Application Number: US202218058803 |