APPARATUS FOR AND METHOD OF ACCELERATING DROPLETS IN A DROPLET GENERATOR FOR AN EUV SOURCE

Apparatus for and method of accelerating droplets used to generate EUV radiation that comprise an arrangement producing a laser beam directed to an irradiation region and a droplet source. The droplet source includes a fluid exiting a nozzle in a stream that breaks up into droplets that then undergo...

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Main Authors Rajyaguru, Chirag, Vaschenko, Georgiy Olegovich, Rafac, Robert Jay, Lukens, Joshua Mark, Driessen, Theodorus Wilhelmus, Ershov, Alexander Igorevich, Trees, Dietmar Uwe Herbert
Format Patent
LanguageEnglish
Published 25.05.2023
Subjects
ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
ELECTRICITY
X-RAY TECHNIQUE
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Summary:Apparatus for and method of accelerating droplets used to generate EUV radiation that comprise an arrangement producing a laser beam directed to an irradiation region and a droplet source. The droplet source includes a fluid exiting a nozzle in a stream that breaks up into droplets that then undergo coalescence. The droplets are then subjected to a stream of gas that entrains and accelerates the droplets.
Bibliography:Application Number: US202118011593