Piezoelectric Micromachined Ultrasonic Transducer

• Main Authors: HERRERA, Bernard, RINALDI, Matteo, POP, Flavius
• Format: Patent
• Language: English
• Published: 11.05.2023
• Subjects: MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICALDEVICES; MICROSTRUCTURAL TECHNOLOGY; PERFORMING OPERATIONS; TRANSPORTING

Devices for ultrasonic transmission and/or reception having a piezoelectric micromachined ultrasonic transducer (pMUT). The device employs a material such as lithium niobate as a piezoelectric layer in a membrane suspended over a cavity. Two activation electrodes on an upper surface of the membrane...