Piezoelectric Micromachined Ultrasonic Transducer
Devices for ultrasonic transmission and/or reception having a piezoelectric micromachined ultrasonic transducer (pMUT). The device employs a material such as lithium niobate as a piezoelectric layer in a membrane suspended over a cavity. Two activation electrodes on an upper surface of the membrane...
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Main Authors | , , |
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Format | Patent |
Language | English |
Published |
11.05.2023
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Subjects | |
Online Access | Get full text |
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