Piezoelectric Micromachined Ultrasonic Transducer

Devices for ultrasonic transmission and/or reception having a piezoelectric micromachined ultrasonic transducer (pMUT). The device employs a material such as lithium niobate as a piezoelectric layer in a membrane suspended over a cavity. Two activation electrodes on an upper surface of the membrane...

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Bibliographic Details
Main Authors HERRERA, Bernard, RINALDI, Matteo, POP, Flavius
Format Patent
LanguageEnglish
Published 11.05.2023
Subjects
MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICALDEVICES
MICROSTRUCTURAL TECHNOLOGY
PERFORMING OPERATIONS
TRANSPORTING
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Summary:Devices for ultrasonic transmission and/or reception having a piezoelectric micromachined ultrasonic transducer (pMUT). The device employs a material such as lithium niobate as a piezoelectric layer in a membrane suspended over a cavity. Two activation electrodes on an upper surface of the membrane can activate one or more flexural modes of mechanical vibration in the membrane, the flexural modes of vibration including a displacement in a cross-sectional plane of the membrane. The device can be used individually or in an array. The device can be configured for use in a liquid medium or in biological tissue. A method of operating an ultrasonic transducer is provided. A method of fabrication of an ultrasonic transducer is provided.
Bibliography:Application Number: US202217986280