TRANSFER APPARATUS AND FILM DEPOSITION APPARATUS USING TRANSFER APPARATUS
To provide a highly productive, compact, and inexpensive film deposition apparatus while ensuring the stability of the film deposition quality, the apparatus includes a rotating body configured to be rotatable and provided with a holding unit that holds an object to be transferred in an attachable a...
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Main Authors | , |
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Format | Patent |
Language | English |
Published |
20.04.2023
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Subjects | |
Online Access | Get full text |
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Summary: | To provide a highly productive, compact, and inexpensive film deposition apparatus while ensuring the stability of the film deposition quality, the apparatus includes a rotating body configured to be rotatable and provided with a holding unit that holds an object to be transferred in an attachable and detachable manner, the holding unit being provided along an outer peripheral portion of the rotating body; and a transfer mechanism having a gripping mechanism capable of gripping and releasing the object, the transfer mechanism transferring the object held by a predetermined device to the holding unit of the rotating body and transferring another object held by the rotating body to the predetermined device. |
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Bibliography: | Application Number: US202017788192 |