MEMORY DEVICE AND MANUFACTURING METHOD THEREOF

• Main Authors: HWU, Jenn-Gwo, CHIANG, Tzu-Hao
• Format: Patent
• Language: English
• Published: 20.04.2023
• Subjects: ELECTRICITY

A memory device includes a transistor, a memory cell, and an interconnect layer. The transistor includes a bottom source/drain portion, a channel portion, and a top source/drain portion stacked from bottom to top and a gate structure surrounding the channel portion. The memory cell includes a nanowire bottom electrode, a first dielectric layer, a second dielectric layer, and a top electrode. The first dielectric layer laterally surrounds the nanowire bottom electrode. The second dielectric layer is over the nanowire bottom electrode and the first dielectric layer. The second dielectric layer is in contact with a top surface of the nanowire bottom electrode and a sidewall of the first dielectric layer. The top electrode covers the second dielectric layer. The interconnect layer is over the transistor and the memory cell to interconnect the transistor and the memory cell.