PROCESS OF MANUFACTURING AN X-RAY IMAGING DEVICE AND TO AN X-RAY IMAGING DEVICE PRODUCED BY SUCH A PROCESS

• Main Authors: KRONEMEIJER, Auke Jisk, AKKERMAN, Hylke Broer, GELINCK, Gerwin Hermanus, VAN DER STEEN, Jan-Laurens Pieter Jacobus, VAN BREEMEN, Albert Jos Jan Marie
• Format: Patent
• Language: English
• Published: 06.04.2023
• Subjects: BASIC ELECTRIC ELEMENTS; ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR; ELECTRICITY; MEASUREMENT OF NUCLEAR OR X-RADIATION; MEASURING; PHYSICS; SEMICONDUCTOR DEVICES; TESTING

An X-ray imaging device with an X-ray conversion area on a flexible circuit such as a Thin Film Transistor circuit with an array of detector cells is manufactured in a method comprising the steps of - providing a flexible carrier layer on a substrate plate, with a first surface of the flexible carrier layer attached to the substrate plate and a second surface of the flexible carrier layer exposed, whereby the substrate plate hinders the flexible carrier layer from bending; - creating an array of detector cells on a part of the second surface; - mounting a peripheral circuit on the second surface outside said part, interconnected to the array of detector cells; - attaching a further layer to the second surface, after or before mounting the peripheral circuit, the further layer comprising an X-ray conversion area at least over the array of detector cells, the further layer being attached to the flexible carrier layer beyond a first edge of the array of detector cells, and beyond the peripheral circuit, the further layer comprising a recess or and opening to accommodate the peripheral circuit; - detaching the substrate plate from the flexible carrier layer before the end of manufacturing the X-ray imaging device.