DEVICE FOR CONTROLLING TRAPPED IONS WITH REINFORCED ION TRAP METAL LAYER
A device for controlling trapped ions includes a substrate. A structured first metal layer is disposed over the substrate. The structured first metal layer forms electrodes of an ion trap configured to trap ions in a space above the structured first metal layer. The structured first metal layer is f...
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Main Authors | , , , , , , |
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Format | Patent |
Language | English |
Published |
30.03.2023
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Subjects | |
Online Access | Get full text |
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Summary: | A device for controlling trapped ions includes a substrate. A structured first metal layer is disposed over the substrate. The structured first metal layer forms electrodes of an ion trap configured to trap ions in a space above the structured first metal layer. The structured first metal layer is formed of a multilayer stack. The multilayer stack includes an electrically conductive layer of a first material and a mechanical stabilization layer of a second material. The second material has an elastic modulus greater than the elastic modulus of the first material and/or the second material has a yield strength greater than the yield strength of the first material. |
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Bibliography: | Application Number: US202217953411 |