SEMICONDUCTOR DEVICE, SEMICONDUCTOR DEVICE MANUFACTURING METHOD, INVERTER CIRCUIT, DRIVE DEVICE, VEHICLE, AND ELEVATOR

• Main Authors: KIMOTO, Shinichi, IIJIMA, Ryosuke, HARADA, Shinsuke
• Format: Patent
• Language: English
• Published: 16.03.2023
• Subjects: BASIC ELECTRIC ELEMENTS; ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR; ELECTRICITY; SEMICONDUCTOR DEVICES

A semiconductor device of embodiments includes: a silicon carbide layer including a trench, a n-type first SiC region, a p-type second SiC region on the first SiC region, a n-type third SiC region on the second SiC region, a fourth SiC region of p-type between the first trench and the first SiC region, and a fifth SiC region electrically connecting the second SiC region and the fourth SiC region; and a gate electrode in the trench. The first trench has a first region extending in a first direction, a second region continuous with the first region, and a third region continuous with the second region and extending in the first direction. The second width of the second region in the second direction is larger than the first width of the first region in the second direction. The fifth SiC region is disposed in the second direction of the second region.