PIEZOELECTRIC DEVICE WITH PILLAR STRUCTURE AND METHOD OF MANUFACTURING

• Main Authors: PETERS, Laurens Christiaan Johannes Maria, GELINCK, Gerwin Hermanus, VAN DER STEEN, Jan-Laurens Pieter Jacobus, VERBEEK, Roy Gerardus Franciscus, VAN NEER, Paul Louis Maria Joseph
• Format: Patent
• Language: English
• Published: 09.03.2023
• Subjects: ELECTRICITY; FOR PERFORMING MECHANICAL WORK IN GENERAL; GENERATING OR TRANSMITTING MECHANICAL VIBRATIONS IN GENERAL; METHODS OR APPARATUS FOR GENERATING OR TRANSMITTING MECHANICALVIBRATIONS OF INFRASONIC, SONIC, OR ULTRASONIC FREQUENCY; PERFORMING OPERATIONS; TRANSPORTING

A piezoelectric device and method of manufacturing are described. A first substrate is provided with an array of pillars comprising piezoelectric material. A second substrate is provided with a piezoelectric layer facing respective ends of the pillars. The respective ends of the pillars are pushed into the piezoelectric layer, while the piezoelectric layer is at least partially liquid. The piezoelectric layer is solidified to form an integral connection between the piezoelectric layer and the pillars. The piezoelectric layer can thus form a bridging structure between the respective ends of the pillars. The integral piezoelectric structure can be poled by high voltage. The bridging structure can act as a platform for depositing electrical contacts. The piezoelectric device can be used for generating or detecting acoustic waves, e.g. in medical imaging.