COMBINATION PREPARATION PROCESS AND COMBINATION PREPARATION SYSTEM FOR ZIRCONIA AND METHYLCHLOROSILANE AND/OR POLYSILICON

• Main Authors: WU, Zhufeng, YIN, Bo, HUANG, Bin, FAN, Xiecheng, CHEN, Guohui, LIU, Xingping
• Format: Patent
• Language: English
• Published: 09.03.2023
• Subjects: ACYCLIC, CARBOCYCLIC OR HETEROCYCLIC COMPOUNDS CONTAININGELEMENTS OTHER THAN CARBON, HYDROGEN, HALOGEN, OXYGEN, NITROGEN,SULFUR, SELENIUM OR TELLURIUM; CHEMISTRY; COMPOUNDS CONTAINING METALS NOT COVERED BY SUBCLASSESC01D OR C01F; INORGANIC CHEMISTRY; METALLURGY; ORGANIC CHEMISTRY

Disclosed is a combined process for preparing zirconium oxide, methyl chlorosilane and/or polycrystalline silicon and a combined system comprising: preparing zirconium oxide by using zircon sand, carbon, chlorine gas, silicon, and hydrogen chloride as raw materials, the products separated during preparing zirconium oxide include gas phase products and liquid phase products, methyl chlorosilane is prepared from the gas phase separated during preparing zirconium oxide, and polycrystalline silicon is prepared by using the liquid phase products as raw materials. In this invention, not only carbon monoxide, hydrogen chloride and other waste gases generated are used as raw materials for producing methyl chlorosilane, but also a by-product silicon tetrachloride generated is used as a raw material for producing polycrystalline silicon, thereby effectively recycling waste gases and silicon tetrachloride, reducing the treatment cost of waste gases and silicon tetrachloride and the production cost of methyl chlorosilane and polycrystalline silicon, and avoiding environmental pollution.