TORSION PUMP, CHEMICAL LIQUID SUPPLYING APPARATUS, AND SUBSTRATE TREATING APPARATUS

Provided is a pump for supplying a liquid, the pump including: a flexible tube body including a pump chamber; first flange provided at one end of the tube body and including an inlet communicating with the pump chamber; a second flange provided at the other end of the tube body and including an outl...

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Bibliographic Details
Main Authors SON, Young Jun, JUNG, Woo Sin, CHOI, Byoung Doo, JUNG, Sung Chul, LEE, Woo Ram, EUM, Ki Sang, YUN, Young Un
Format Patent
LanguageEnglish
Published 02.03.2023
Subjects
APPARATUS SPECIALLY ADAPTED THEREFOR
BLASTING
CINEMATOGRAPHY
ELECTROGRAPHY
HEATING
HOLOGRAPHY
LIGHTING
MATERIALS THEREFOR
MECHANICAL ENGINEERING
ORIGINALS THEREFOR
PHOTOGRAPHY
PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES,e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTORDEVICES
PHYSICS
POSITIVE DISPLACEMENT MACHINES FOR LIQUIDS
PUMPS
PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
WEAPONS
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Summary:Provided is a pump for supplying a liquid, the pump including: a flexible tube body including a pump chamber; first flange provided at one end of the tube body and including an inlet communicating with the pump chamber; a second flange provided at the other end of the tube body and including an outlet communicating with the pump chamber; and driving unit for transmitting rotational force to the tube body to twist the tube body.
Bibliography:Application Number: US202217896518