SYSTEMS, DEVICES, AND METHODS FOR CONTAMINANT RESISTANT INSULATIVE STRUCTURES
Embodiments of systems, devices, and methods relate to an electrode standoff isolator. An example electrode standoff isolator includes a plurality of adj acent insulative segments positioned between a proximal end and a distal end of the electrode standoff isolator. A geometry of the adjacent insula...
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Main Authors | , , |
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Format | Patent |
Language | English |
Published |
23.02.2023
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Subjects | |
Online Access | Get full text |
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Summary: | Embodiments of systems, devices, and methods relate to an electrode standoff isolator. An example electrode standoff isolator includes a plurality of adj acent insulative segments positioned between a proximal end and a distal end of the electrode standoff isolator. A geometry of the adjacent insulative is configured to guard a surface area of the electrode standoff isolator against deposition of a conductive layer of gaseous phase materials from a filament of an ion source. |
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Bibliography: | Application Number: US202217740699 |