METHODS AND SYSTEMS FOR WAFER SCALE TRANSDUCER ARRAY FABRICATION
Various methods and systems are provided for a multi-frequency transducer array. In one example, the transducer array may be fabricated via a wafer scale approach, where a first comb structure, with a first type of element, is formed by dicing a first acoustic stack and a second comb structure, with...
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Main Authors | , , |
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Format | Patent |
Language | English |
Published |
26.01.2023
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Subjects | |
Online Access | Get full text |
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Summary: | Various methods and systems are provided for a multi-frequency transducer array. In one example, the transducer array may be fabricated via a wafer scale approach, where a first comb structure, with a first type of element, is formed by dicing a first acoustic stack and a second comb structure, with a second type of element, is formed by dicing a second acoustic stack. Combining the first and second comb structures may form a multi-frequency transducer array. |
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Bibliography: | Application Number: US202217938567 |