TSV PHASE SHIFTER

• Main Author: Woods, JR., Wayne H
• Format: Patent
• Language: English
• Published: 29.12.2022
• Subjects: BASIC ELECTRIC ELEMENTS; DEVICES OR ARRANGEMENTS, THE OPTICAL OPERATION OF WHICH ISMODIFIED BY CHANGING THE OPTICAL PROPERTIES OF THE MEDIUM OF THEDEVICES OR ARRANGEMENTS FOR THE CONTROL OF THE INTENSITY,COLOUR, PHASE, POLARISATION OR DIRECTION OF LIGHT, e.g.SWITCHING, GATING, MODULATING OR DEMODULATING; ELECTRIC COMMUNICATION TECHNIQUE; ELECTRICITY; FREQUENCY-CHANGING; NON-LINEAR OPTICS; OPTICAL ANALOGUE/DIGITAL CONVERTERS; OPTICAL LOGIC ELEMENTS; OPTICS; PHYSICS; RESONATORS, LINES, OR OTHER DEVICES OF THE WAVEGUIDE TYPE; TECHNIQUES OR PROCEDURES FOR THE OPERATION THEREOF; TRANSMISSION OF DIGITAL INFORMATION, e.g. TELEGRAPHICCOMMUNICATION; WAVEGUIDES

A phase shifter includes functional actively controlled phase-shift elements formed with TSVs. The phase shifter may include plural phase shifter elements each including: a signal line including a signal line through-substrate-via (TSV) in a substrate; a ground return line including a ground return line TSV in the substrate; a capacitance control line including a capacitance control line TSV in the substrate; and an inductance control line including an inductance control line TSV in the substrate, wherein the phase shifter element has one of a first phase shift and a second phase shift, different from the first phase shift, based on a capacitance and an inductance of the signal line TSV.