DIGITAL TWIN BASED TEMPERATURE DISTRIBUTION ESTIMATING METHOD AND TEMPERATURE DISTRIBUTION ESTIMATING APPARATUS

The temperature distribution estimating method of the disclosure includes a building operation to build a numerical model for a form and thermal behavior of a substrate; a setting operation to set a regularization parameter to adjust noises of a temperature of the substrate measured by a temperature...

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Bibliographic Details
Main Authors KIM, Jin Gyun, BECK, In Chan, AHN, Chang Uk, KWON, Do Hyeong, LEE, Ji Won
Format Patent
LanguageEnglish
Published 15.12.2022
Subjects
CALCULATING
COMPUTING
COUNTING
ELECTRIC DIGITAL DATA PROCESSING
PHYSICS
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