DIGITAL TWIN BASED TEMPERATURE DISTRIBUTION ESTIMATING METHOD AND TEMPERATURE DISTRIBUTION ESTIMATING APPARATUS

The temperature distribution estimating method of the disclosure includes a building operation to build a numerical model for a form and thermal behavior of a substrate; a setting operation to set a regularization parameter to adjust noises of a temperature of the substrate measured by a temperature...

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Bibliographic Details
Main Authors KIM, Jin Gyun, BECK, In Chan, AHN, Chang Uk, KWON, Do Hyeong, LEE, Ji Won
Format Patent
LanguageEnglish
Published 15.12.2022
Subjects
CALCULATING
COMPUTING
COUNTING
ELECTRIC DIGITAL DATA PROCESSING
PHYSICS
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Summary:The temperature distribution estimating method of the disclosure includes a building operation to build a numerical model for a form and thermal behavior of a substrate; a setting operation to set a regularization parameter to adjust noises of a temperature of the substrate measured by a temperature sensor; a generating operation to generate a sensitivity coefficient matrix that estimates a heat source received by the substrate from a plurality of heaters; a condensing operation to condense the sensitivity coefficient matrix based on a power ratio input in the heaters respectively; and estimating operation to estimate an entire temperature distribution of the substrate based on the numerical model, the regularization parameter, and the condensed sensitivity coefficient matrix, when predetermined temperature data are input.
Bibliography:Application Number: US202217670050