Bath Systems and Methods Thereof
A method of processing a plurality of substrates includes immersing the plurality of substrates into a bath solution contained in a bath chamber; generating gas bubbles in the bath solution; projecting light from a light source toward the bath chamber; generating light sensor data by capturing light...
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Main Authors | , , , , , |
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Format | Patent |
Language | English |
Published |
08.12.2022
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Subjects | |
Online Access | Get full text |
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Summary: | A method of processing a plurality of substrates includes immersing the plurality of substrates into a bath solution contained in a bath chamber; generating gas bubbles in the bath solution; projecting light from a light source toward the bath chamber; generating light sensor data by capturing light emanating off the bath chamber after interacting with the gas bubbles with a light sensor; and converting the light sensor data into a metric for the bath solution. |
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Bibliography: | Application Number: US202117341105 |