Hotspot Avoidance Method of Manufacturing Integrated Circuits

• Main Authors: Hong, William Weilun, Liu, I-Shuo, Chou, Hsin-Ting, Hsia, Chih-Chun, Chen, Chih Hung, Su, Kuanhua, Chen, Kei-Wei
• Format: Patent
• Language: English
• Published: 01.12.2022
• Subjects: CALCULATING; COMPUTING; COUNTING; ELECTRIC DIGITAL DATA PROCESSING; IMAGE DATA PROCESSING OR GENERATION, IN GENERAL; PHYSICS

A method includes cropping a plurality of images from a layout of an integrated circuit, generating a first plurality of hash values, each from one of the plurality of images, loading a second plurality of hash values stored in a hotspot library, and comparing each of the first plurality of hash values with each of the second plurality of hash values. The step of comparing includes calculating a similarity value between the each of the first plurality of hash values and the each of the second plurality of hash values. The method further includes comparing the similarity value with a pre-determined threshold similarity value, and in response to a result that the similarity value is greater than the pre-determined threshold similarity value, recording a position of a corresponding image that has the result. The position is the position of the corresponding image in the layout.