METHOD OF FABRICATING DIFFRACTION GRATINGS

A method of fabricating a blazed diffraction grating comprises providing a master template substrate and imprinting periodically repeating lines on the master template substrate in a plurality of master template regions. The periodically repeating lines in different ones of the master template regio...

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Bibliographic Details
Main Authors Singh, Vikramjit, Luo, Kang, Yang, Shuqiang, Xu, Frank Y
Format Patent
LanguageEnglish
Published 17.11.2022
Subjects
OPTICAL ELEMENTS, SYSTEMS, OR APPARATUS
OPTICS
PHYSICS
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Summary:A method of fabricating a blazed diffraction grating comprises providing a master template substrate and imprinting periodically repeating lines on the master template substrate in a plurality of master template regions. The periodically repeating lines in different ones of the master template regions extend in different directions. The method additionally comprises using at least one of the master template regions as a master template to imprint at least one blazed diffraction grating pattern on a grating substrate.
Bibliography:Application Number: US202217868485