PORTABLE FLUORINE GENERATOR FOR ON-SITE CALIBRATION
A method and apparatus for generation of fluorine gas (F2) in situ at the point of use is provided. The portable fluorine generator includes a dilution system disposed within a housing and operable to mix a feed gas comprising fluorine with an inert gas. The portable fluorine generator further inclu...
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Main Author | |
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Format | Patent |
Language | English |
Published |
20.10.2022
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Subjects | |
Online Access | Get full text |
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Summary: | A method and apparatus for generation of fluorine gas (F2) in situ at the point of use is provided. The portable fluorine generator includes a dilution system disposed within a housing and operable to mix a feed gas comprising fluorine with an inert gas. The portable fluorine generator further includes a plasma reactor unit disposed within the housing and operable to separate fluorine (F2) from the feed gas comprising fluorine. |
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Bibliography: | Application Number: US202117230514 |