PORTABLE FLUORINE GENERATOR FOR ON-SITE CALIBRATION

A method and apparatus for generation of fluorine gas (F2) in situ at the point of use is provided. The portable fluorine generator includes a dilution system disposed within a housing and operable to mix a feed gas comprising fluorine with an inert gas. The portable fluorine generator further inclu...

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Bibliographic Details
Main Author VAN GOMPEL, Joseph A
Format Patent
LanguageEnglish
Published 20.10.2022
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Summary:A method and apparatus for generation of fluorine gas (F2) in situ at the point of use is provided. The portable fluorine generator includes a dilution system disposed within a housing and operable to mix a feed gas comprising fluorine with an inert gas. The portable fluorine generator further includes a plasma reactor unit disposed within the housing and operable to separate fluorine (F2) from the feed gas comprising fluorine.
Bibliography:Application Number: US202117230514