SEMICONDUCTOR DIE WITH A POWER DEVICE AND METHOD OF MANUFACTURING THE SAME
The disclosure relates to a semiconductor die with a transistor device, which has a channel region formed in a semiconductor body, a gate region aside the channel region, for controlling a channel formation, a drift region formed in the semiconductor body, and a field electrode in a field electrode...
Saved in:
Main Authors | , , , , , |
---|---|
Format | Patent |
Language | English |
Published |
08.09.2022
|
Subjects | |
Online Access | Get full text |
Cover
Loading…
Summary: | The disclosure relates to a semiconductor die with a transistor device, which has a channel region formed in a semiconductor body, a gate region aside the channel region, for controlling a channel formation, a drift region formed in the semiconductor body, and a field electrode in a field electrode trench, which extends from a frontside of the semiconductor body vertically into the drift region, wherein an insulating layer is formed on the frontside of the semiconductor body and a frontside metallization is formed on the insulating layer, and wherein a capacitor electrode is formed in the insulating layer, which is conductively connected to at least a portion of the field electrode. |
---|---|
Bibliography: | Application Number: US202217682113 |