SEMICONDUCTOR DIE WITH A POWER DEVICE AND METHOD OF MANUFACTURING THE SAME

The disclosure relates to a semiconductor die with a transistor device, which has a channel region formed in a semiconductor body, a gate region aside the channel region, for controlling a channel formation, a drift region formed in the semiconductor body, and a field electrode in a field electrode...

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Bibliographic Details
Main Authors Tegen, Stefan, Kubasch, Christoph, Ferrara, Alessandro, Kroenke, Matthias, Finney, Adrian, Weis, Rolf
Format Patent
LanguageEnglish
Published 08.09.2022
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Summary:The disclosure relates to a semiconductor die with a transistor device, which has a channel region formed in a semiconductor body, a gate region aside the channel region, for controlling a channel formation, a drift region formed in the semiconductor body, and a field electrode in a field electrode trench, which extends from a frontside of the semiconductor body vertically into the drift region, wherein an insulating layer is formed on the frontside of the semiconductor body and a frontside metallization is formed on the insulating layer, and wherein a capacitor electrode is formed in the insulating layer, which is conductively connected to at least a portion of the field electrode.
Bibliography:Application Number: US202217682113