VIBRATION DETECTION SYSTEM

A vibration detection system (100) detects vibration of an ultrasonic horn (12), of which the front surface is a non-specular surface, and of a capillary (13), wherein the vibration detection system (100) includes a laser light source (20) that irradiates the ultrasonic horn (12) and the capillary (...

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Bibliographic Details
Main Authors KIRKBY, Michael, NAKANO, Shota, MUNAKATA, Hiroshi
Format Patent
LanguageEnglish
Published 08.09.2022
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Summary:A vibration detection system (100) detects vibration of an ultrasonic horn (12), of which the front surface is a non-specular surface, and of a capillary (13), wherein the vibration detection system (100) includes a laser light source (20) that irradiates the ultrasonic horn (12) and the capillary (13) with parallel laser light beams (21), a camera (30) having an imaging element (31) that captures an image of the ultrasonic horn (12) and the capillary (13) irradiated with the parallel laser light beams (21), and an image processing device (40) that processes the image captured by the camera (30) and displays a location where vibration occurs.
Bibliography:Application Number: US202017626490