ELECTROSTATIC ACTUATOR WITH 4-BIT DIGITAL ELECTRODE
A system includes a hinge structure. The hinge structure includes four support posts and four hinges, each hinge coupled to an edge of a support post and to a plate of the hinge structure, where each hinge includes two 90° turns. The system also includes a mirror coupled to the hinge structure and a...
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Main Authors | , , , |
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Format | Patent |
Language | English |
Published |
25.08.2022
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Subjects | |
Online Access | Get full text |
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Summary: | A system includes a hinge structure. The hinge structure includes four support posts and four hinges, each hinge coupled to an edge of a support post and to a plate of the hinge structure, where each hinge includes two 90° turns. The system also includes a mirror coupled to the hinge structure and an electrode structure coupled to the hinge structure. |
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Bibliography: | Application Number: US202117398907 |