MEMS DIE WITH A DIAPHRAGM HAVING A STEPPED OR TAPERED PASSAGE FOR INGRESS PROTECTION

A MEMS die includes a substrate having an opening formed therein, a diaphragm having a first surface attached around a periphery thereof to the substrate and over the opening, and a backplate separated from a second surface of the diaphragm. The diaphragm includes at least one passage disposed betwe...

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Bibliographic Details
Main Authors WAKEFIELD, Nick, LEE, Sung, SHARMA, Ankur, NADERYAN, Vahid
Format Patent
LanguageEnglish
Published 11.08.2022
Subjects
DEAF-AID SETS
ELECTRIC COMMUNICATION TECHNIQUE
ELECTRICITY
LOUDSPEAKERS, MICROPHONES, GRAMOPHONE PICK-UPS OR LIKEACOUSTIC ELECTROMECHANICAL TRANSDUCERS
PUBLIC ADDRESS SYSTEMS
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Summary:A MEMS die includes a substrate having an opening formed therein, a diaphragm having a first surface attached around a periphery thereof to the substrate and over the opening, and a backplate separated from a second surface of the diaphragm. The diaphragm includes at least one passage disposed between the first and second surfaces, and the at least one passage has a smaller cross-sectional area at the first surface than at the second surface.
Bibliography:Application Number: US202117173661