COMPUTER-IMPLEMENTED METHOD FOR THE AUTOMATIC CLASSIFICATION OF EMITTER STRUCTURES, APPARATUS FOR CARRYING OUT THE METHOD, MACHINE-READABLE PROGRAM CODE AND STORAGE MEDIUM

At least one example embodiment relates to an apparatus, machine-readable program code, a storage medium and computer-implemented method for the automatic classification of emitter structures embodied to emit electrons for the generation of X-rays, wherein the classification takes place on the basis...

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Bibliographic Details
Main Authors LUTZ, Benjamin Samuel, FUERST, Jens, SELMAIER, Andreas
Format Patent
LanguageEnglish
Published 28.07.2022
Subjects
CALCULATING
COMPUTING
COUNTING
IMAGE DATA PROCESSING OR GENERATION, IN GENERAL
PHYSICS
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Summary:At least one example embodiment relates to an apparatus, machine-readable program code, a storage medium and computer-implemented method for the automatic classification of emitter structures embodied to emit electrons for the generation of X-rays, wherein the classification takes place on the basis of a reference image of an emitter structure, wherein the classification comprises a first class and at least one second class, wherein the first class corresponds to a substantially defect-free emitter structure and the at least one second class corresponds to a defective emitter structure. Since, for the classification, an image embodied as a fusion image from a bright-field image and a dark-field image is referred to and the classification of the emitter structure into the first and the second class takes place on the basis of this image, improved defect checking of emitter structures can be provided.
Bibliography:Application Number: US202217580731