ELECTRICAL CHARACTERISTIC INSPECTION DEVICE FOR SEMICONDUCTOR DEVICE AND ELECTRICAL CHARACTERISTIC INSPECTION METHOD FOR SEMICONDUCTOR DEVICE

An object is to provide a technique capable of creating a precise measurement condition in a facilitated manner relating to an electrical characteristic inspection for a semiconductor device. An electrical characteristic inspection device includes a storage unit configured to store a measurement con...

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Bibliographic Details
Main Authors OGATA, Sumito, NOGUCHI, Takaya, HISAOKA, Yasushi
Format Patent
LanguageEnglish
Published 21.07.2022
Subjects
MEASURING
MEASURING ELECTRIC VARIABLES
MEASURING MAGNETIC VARIABLES
PHYSICS
TESTING
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Summary:An object is to provide a technique capable of creating a precise measurement condition in a facilitated manner relating to an electrical characteristic inspection for a semiconductor device. An electrical characteristic inspection device includes a storage unit configured to store a measurement condition of the semiconductor device being an inspection subject, a control unit configured to read out the measurement condition corresponding to inspection contents to be executed from the storage unit, an inductive inductance control circuit unit configured to set inductive inductance for the semiconductor device, and a floating inductance control circuit unit configured to set floating inductance for the semiconductor device. Based on the measurement condition read out from the storage unit, the control unit is configured to adjust the inductive inductance by controlling the inductive inductance control circuit unit, and adjust the floating inductance by controlling the floating inductance control circuit unit.
Bibliography:Application Number: US202117499607