OBJECT POSITIONER, METHOD FOR CORRECTING THE SHAPE OF AN OBJECT, LITHOGRAPHIC APPARATUS, OBJECT INSPECTION APPARATUS, DEVICE MANUFACTURING METHOD

The invention provides an object positioner comprising:-an object support having an object support surface which is configured to engage at least a part of an object, said object support surface having a support surface temperature,-a thermal device, which thermal device is configured to provide at...

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Bibliographic Details
Main Authors VOZNYI, Oleg Viacheslavovich, FRENCKEN, Mark Johannes Hermanus, NAGTEGAAL, Theodorus Marcus
Format Patent
LanguageEnglish
Published 07.07.2022
Subjects
APPARATUS SPECIALLY ADAPTED THEREFOR
CINEMATOGRAPHY
ELECTROGRAPHY
HOLOGRAPHY
MATERIALS THEREFOR
ORIGINALS THEREFOR
PHOTOGRAPHY
PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES,e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTORDEVICES
PHYSICS
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Summary:The invention provides an object positioner comprising:-an object support having an object support surface which is configured to engage at least a part of an object, said object support surface having a support surface temperature,-a thermal device, which thermal device is configured to provide at least a part of the object with a first object temperature, which first object temperature differs from the support surface temperature by a first predetermined temperature difference.
Bibliography:Application Number: US202017606785