BARRIER STRUCTURE WITHIN A MICROELECTRONIC ENCLOSURE

• Main Authors: SCHUCK, Kathryn Anne, TAYLOR, Kelly Jay, ROBY, Mary Alyssa Drummond, JACOBS, Simon Joshua, HOLM, Jennifer Lynne
• Format: Patent
• Language: English
• Published: 07.07.2022
• Subjects: MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICALDEVICES; MICROSTRUCTURAL TECHNOLOGY; OPTICAL ELEMENTS, SYSTEMS, OR APPARATUS; OPTICS; PERFORMING OPERATIONS; PHYSICS; PROCESSES OR APPARATUS SPECIALLY ADAPTED FOR THE MANUFACTUREOR TREATMENT OF MICROSTRUCTURAL DEVICES OR SYSTEMS; TRANSPORTING

A device includes a first substrate. The device also includes a barrier structure including a metallic layer on the first substrate, where the barrier structure forms a cavity. The device also includes a second substrate on the metallic layer, where the metallic layer extends between the first subst...