ELECTROMECHANICAL MICROSYSTEM

The invention relates to an electromechanical microsystem 1 including at least two electromechanical transducers 11 and 11a, a deformable diaphragm 12 and a cavity 13 hermetically containing a deformable medium 14 maintaining a constant volume under the action of an external pressure change. The def...

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Bibliographic Details
Main Authors SAINT-PATRICE, Damien, NICOLAS, Stéphane, MOLLARD, Laurent
Format Patent
LanguageEnglish
Published 23.06.2022
Subjects
MEASURING
MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER,MECHANICAL EFFICIENCY, OR FLUID PRESSURE
MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICALDEVICES
MICROSTRUCTURAL TECHNOLOGY
OPTICAL ELEMENTS, SYSTEMS, OR APPARATUS
OPTICS
PERFORMING OPERATIONS
PHYSICS
TESTING
TRANSPORTING
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Summary:The invention relates to an electromechanical microsystem 1 including at least two electromechanical transducers 11 and 11a, a deformable diaphragm 12 and a cavity 13 hermetically containing a deformable medium 14 maintaining a constant volume under the action of an external pressure change. The deformable diaphragm forms a cavity wall and has at least one deformable free area 121. The electromechanical transducers are configured so that their movement is a function of the said external pressure change, and conversely, and be in the same direction for at least two of them. The electromechanical microsystem 1 is thus able to deform the free area of the diaphragm in step mode towards the inside or outside of the cavity.
Bibliography:Application Number: US202117558143