INCREASED MUT COUPLING EFFICIENCY AND BANDWIDTH VIA EDGE GROOVE, VIRTUAL PIVOTS, AND FREE BOUNDARIES

Methods for improving the electromechanical coupling coefficient and bandwidth of micromachined ultrasonic transducers, or MUTs, are presented as well as methods of manufacture of the MUTs improved by the presented methods.

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Bibliographic Details
Main Authors Bircumshaw, Brian Lee, Akkaraju, Sandeep, Kwon, Haesung
Format Patent
LanguageEnglish
Published 23.06.2022
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Summary:Methods for improving the electromechanical coupling coefficient and bandwidth of micromachined ultrasonic transducers, or MUTs, are presented as well as methods of manufacture of the MUTs improved by the presented methods.
Bibliography:Application Number: US202017272910