GRAPHENE FUNCTIONALIZATION METHOD, APPARATUS, AND FUNCTIONALIZED GRAPHENE PRODUCT

• Main Authors: Russo, Christopher, Cattermole, David, Naydenova, Katerina, Peet, Mathew, Scotcher, Steve, Palmer, Chris
• Format: Patent
• Language: English
• Published: 16.06.2022
• Subjects: BASIC ELECTRIC ELEMENTS; CHEMICAL SURFACE TREATMENT; CHEMISTRY; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATIONOR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY IONIMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; COATING MATERIAL WITH METALLIC MATERIAL; COATING METALLIC MATERIAL; COMPOUNDS THEREOF; DIFFUSION TREATMENT OF METALLIC MATERIAL; ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS; ELECTRICITY; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION INGENERAL; INORGANIC CHEMISTRY; METALLURGY; NON-METALLIC ELEMENTS; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THESURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION

Provided are a method of functionalizing graphene on a substrate, the method comprising the step of: exposing a substrate having a layer of graphene thereon to a plasma comprising helium and at least one functionalizing compound; as well as an apparatus for conducting the method and products formed by it.